发明名称 CANTILEVER FOR VERTICAL SCANNING MICROSCOPE AND PROBE FOR VERTICAL SCAN MICROSCOPE USING IT
摘要 <p>The present invention realizes a probe for a vertical scanning type microscope in which a tip end of a nanotube serving as a probe is caused to abut substantially perpendicularly against the surface of a specimen and can detect surface information of a specimen at a high sensitivity. In order to accomplish the object, in a probe 20 for a scanning type microscope which captures substance information of the surface of a specimen 24 by the tip end of a nanotube probe needle fastened to a cantilever 2, a probe for a vertical scanning type microscope related to the present invention is characterized in that a fixing region, to which the base end portion 14 of a nanotube 12 is fastened, is provided in a cantilever 2 and when the cantilever 2 is set in a measuring state with respect to a mean surface 26 of a specimen, height direction of the above described fixing region is set up substantially perpendicular to the mean surface 26 of the specimen and the base end portion 14 of the nanotube 12 is bonded in the height direction of the fixing region. <IMAGE></p>
申请公布号 EP1278055(A1) 申请公布日期 2003.01.22
申请号 EP20010970308 申请日期 2001.09.28
申请人 DAIKEN CHEMICAL CO., LTD;SEIKO INSTRUMENTS INC.;NAKAYAMA, YOSHIKAZU 发明人 NAKAYAMA, YOSHIKAZU;AKITA, SEIJI;HARADA, AKIO;OKAWA, TAKASHI;TAKANO, YUICHI;YASUTAKE, MASATOSHI;SHIRAKAWABE, YOSHIHARU
分类号 G01Q60/16;G01Q60/32;G01Q60/38;G01Q70/10;G01Q70/12;(IPC1-7):G01N13/16;G12B21/08;G12B21/02 主分类号 G01Q60/16
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