| 发明名称 |
TECHNIQUE FOR DETERMINING CURVATURES OF EMBEDDED LINE FEATURES ON SUBSTRATES |
| 摘要 |
<p>Methods and systems for evaluating stresses in line features formed on substrates. Stresses may be computed from measured curvature information based on simple analytical functions. The curvature information can be obtained optically by, e.g., a coherent gradient sensing method, to obtain a full-field measurement of an illuminated area.</p> |
| 申请公布号 |
EP1277036(A2) |
申请公布日期 |
2003.01.22 |
| 申请号 |
EP20010928961 |
申请日期 |
2001.04.25 |
| 申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
SURESH, SUBRA;PARK, TAE-SOON |
| 分类号 |
H01L21/66;H01L21/02;H01L21/3205;H01L23/544;(IPC1-7):G01N3/00 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
