发明名称 MOS transistor and method of manufacturing
摘要 <p>A method of fabricating a MOS transistor with a controllable and modulatable conduction path through a dielectric gate oxide is disclosed, wherein the transistor structure comprises a dielectric oxide layer (3) formed between two silicon plates (1,2), and wherein the silicon plates (1,2) overhang the oxide layer (3) all around to define an undercut (5) having a substantially rectangular cross-sectional shape. The method comprises the steps of: chemically altering the surfaces of the silicon plates (1,2) to have different functional groups (6,7) provided in the undercut (5) from those in the remainder of the surfaces; and selectively reacting the functional groups (6,7) provided in the undercut (5) with an organic molecule (8) having a reversibly reducible center and a molecular length substantially equal to the width of the undercut (5), thereby to establish a covalent bond to each end of the organic molecule (8). &lt;IMAGE&gt;</p>
申请公布号 EP1278234(A2) 申请公布日期 2003.01.22
申请号 EP20010127923 申请日期 2001.11.23
申请人 STMICROELECTRONICS S.R.L. 发明人 CEROFOLINI, GIANFRANCO;FERLA, GIUSEPPE
分类号 H01L29/788;H01L29/792;H01L51/05;H01L51/30;H01L51/40;H01L21/28;H01L21/8247;H01L27/115;H01L29/51;H01L29/78;(IPC1-7):H01L21/28;H01L51/20 主分类号 H01L29/788
代理机构 代理人
主权项
地址