发明名称 Electronic device, and method of patterning a first layer
摘要 The electronic device (1) has a layer (11) of a material comprising a first and a second element. This material has an amorphous and a crystalline state. A transition from the amorphous to the crystalline state can be effected by heating of the material to above a crystallization temperature, for example with a laser. As a result, the layer (11) has a first electrically conducting areas (21), comprising the material in the crystalline state, which are insulated from each other by the first electrically insulating area (23), comprising the material in the amorphous state. The layer (11) may be present as an interconnect layer, but also as a covering layer. Preferably, the material is aluminum-germanium. In the method of patterning a layer (11), electrically conductive areas of the layer can be strengthened by electroplating.
申请公布号 US6509650(B2) 申请公布日期 2003.01.21
申请号 US20010872996 申请日期 2001.06.01
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 VAN DEN BROEK JAN JOHANNES;LIEDENBAUM COEN THEODORUS HUBERTUS FRANCISCUS;MONTREE ANDREAS HUBERTUS;BOOGAARD ARJEN;DE WILD WILLEM REINDERT;HUIBERTS JOHANNES NICOLAAS
分类号 C25D7/12;H01L21/28;H01L21/3205;H01L23/00;H01L23/485;H01L23/525;(IPC1-7):H01L29/45 主分类号 C25D7/12
代理机构 代理人
主权项
地址