Dynamic quantity sensor having movable and fixed electrodes with high rigidity

摘要

A dynamic quantity sensor has a weigh portion that is supported by a base portion to be displaced by a dynamic quantity, a movable electrode protruding from the weigh portion, and a fixed electrode protruding from the base portion and defining a detection interval with the movable electrode. The detection interval changes in response to displacement of the weight portion for detecting the dynamic quantity. Each of the movable electrode and the fixed electrode has a tapered plane shape with a width that decreases from a root portion toward a tip portion thereof.