METHOD AND APPARATUS FOR PROCESSING SEMICONDUCTOR SUBSTRATES,申请号SG19990005976-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PROCESSING SEMICONDUCTOR SUBSTRATES
摘要
申请公布号	SG93851(A1)	申请公布日期	2003.01.21
申请号	SG19990005976	申请日期	1999.11.26
申请人	KAWASAKI MICROELECTRONICS, INC.	发明人	KATSUNORI SUZUKI;HIDETAKA HORIUCHI;YASUSHI KIKUCHI;JIN YOKOGAWA;RYOUICHI KUBO;KOJI WAKABAYASHI
分类号	H01L21/30;C23C16/44;H01J37/32;H01L21/00;(IPC1-7):H01L21/306;H01L21/465;H01L21/58;C23C14/50;C23C16/00	主分类号	H01L21/30
代理机构		代理人
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地址

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