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发明名称
摘要
申请公布号
JP3369049(B2)
申请公布日期
2003.01.20
申请号
JP19960156879
申请日期
1996.06.18
申请人
发明人
分类号
G01N1/00;G01Q30/02;G01Q30/08;G01Q30/16;G01Q30/20;G01Q60/10;H01J37/20;(IPC1-7):G01N1/00
主分类号
G01N1/00
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代理人
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