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发明名称
摘要
申请公布号	JP3369442(B2)	申请公布日期	2003.01.20
申请号	JP19970210458	申请日期	1997.08.05
申请人		发明人
分类号	G01B21/30;C23C14/00;C23F4/00;G01N37/00;G01Q60/22;G01Q60/38;G01Q60/54;G01Q70/16;G01Q70/18;(IPC1-7):G01N13/14;G01N13/22;G12B21/06;G12B21/10	主分类号	G01B21/30
代理机构		代理人
主权项
地址

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