| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method by which recessed and projecting sections can be formed efficiently in a short time on the surface of a substrate, particularly, a substrate used for solar batteries. SOLUTION: In this method, the surface of a silicon substrate is roughened by dry etching. The drying etching is performed by covering the surface of the silicon substrate with a plate member through which many openings 4a are formed evenly.</p> |
