| 摘要 |
PROBLEM TO BE SOLVED: To lower the drive voltage of a horizontal CCD shift resistor by suppressing incomplete removal of the signal electric charge at a read gate electrode. SOLUTION: There are provided a horizontal CCD shift resistor which transfers the signal electric charge generated from the light incident on a light receiving part, and a read gate electrode (OG) 14 provided on the output side of the horizontal CCD shift resistor. Below the read gate electrode (OG) 14, the film thicknesses of first and second gate insulating films 26 and 25a in the region near the horizontal CCD shift resistor are set to be thinner than those of first, second, and third gate insulating films 26, 25 and 24 in the region on the side opposite to the horizontal CCD shift resistor.
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