发明名称 |
Piezoelectric/electrostrictive device |
摘要 |
A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms. |
申请公布号 |
US2003011283(A1) |
申请公布日期 |
2003.01.16 |
申请号 |
US20020231737 |
申请日期 |
2002.08.30 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
TAKEUCHI YUKIHISA;OHNISHI TAKAO;KIMURA KOJI |
分类号 |
B06B1/06;G01G3/16;G01H11/08;G01N35/00;G01P15/09;G02B26/02;H01L41/09;H01L41/113;H01L41/187;(IPC1-7):H01L41/08 |
主分类号 |
B06B1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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