| 发明名称 |
Fluid control apparatus |
| 摘要 |
<p>A connecting member connected to an extension of a massflow controller has attached thereto a gatelike member to hold the connecting member from opposite sides thereof. The gatelike member has a pressing member for pressing the extension against the connecting member from immediately above a seal portion between the extension and the connecting member. <IMAGE></p> |
| 申请公布号 |
EP0846995(B1) |
申请公布日期 |
2003.01.15 |
| 申请号 |
EP19970121144 |
申请日期 |
1997.12.02 |
| 申请人 |
FUJIKIN INCORPORATED |
发明人 |
NAKAZAWA, MASAHIKO;TSUKADA, KAZUO;YAMAJI, MICHIO;TANAKA, HISASHI |
| 分类号 |
F17D1/02;G05D7/00;(IPC1-7):G05D16/00;F16K27/00 |
主分类号 |
F17D1/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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