COMPOSITE TYPE PIEZOELECTRIC VIBRATING PARTS AND METHOD OF MANUFACTURING FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To solve the problem with composite type piezoelectric parts having a structure obtained by joining a piezoelectric member provided with multilayered metallic films and an elastic member across a brazing filler metals that the prescribed output is not obtainable in a microminiature type composite type piezoelectric parts of size of mm by the influence of vibration attenuation because the affinity of the joint surfaces of the elastic member to the brazing filler metals is not heretofore considered. SOLUTION: The piezoelectric member of the composite type piezoelectric parts having the structure obtained by joining piezoelectric member and the elastic member across the brazing filler metal is formed so that the surface of the piezoelectric member is provided with the first multilayer metallic films consisting of a first contact layer having the high affinity to the piezoelectric member, a first barrier layer for preventing the diffusion of the brazing filler metal and a first brazing layer having the high affinity to the brazing filler metal and so that the surface of the elastic member is provided with the second multilayer metallic films consisting of a second contact layer having the high affinity to the elastic member, a second barrier layer for preventing the diffusion of the brazing filler metal and a second brazing layer having the high affinity to the brazing filler metal.