| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode for corona electric discharge, in which a crevice cannot be generated easily between an electrode and dielectric components, and a part of the dielectric components cannot be dispersed easily at the time of a charge processing, and to provide surface treatment equipment using it. SOLUTION: This electrode 11 for corona electric discharge is used for the surface treatment equipment 1, which carries out the surface treatment of a processing object surface of a substrate 16 by corona electric discharge. It is constituted with a stick-like metal electrode 11a, a 1st dielectric component 11b which is formed of a hard-nature material and covers the metal electrode 11a along with the perimeter of the longer direction of the metal electrode 11a, and a 2nd dielectric component 11c, which is formed of a material, which has pliability, is filled up in the crevice between the metal electrode 11a and the 1st dielectric component 11b and is stuck to both of the metal electrode 11a and the 1st dielectric component 11b. |
