| 摘要 |
PROBLEM TO BE SOLVED: To prevent the performance of an aligner from deteriorating by sustaining temperature regulation constantly at a high accuracy part, e.g. a projection lens, even when the aligner is not operated but stored. SOLUTION: A temperature regulation facility 2 for regulating temperature of a chamber 1 containing an exposing stage 10 comprises a partial temperature regulating section 30 performing temperature regulation only of a high accuracy part, e.g. a projection lens 14, by surrounding it with a temperature regulation cover 17, and a main temperature regulating section 20 performing temperature regulation in the chamber 1 entirely. When temperature regulation of a clean room for installing the chamber 1 is stopped for maintenance under a state where the exposing stage 10 is not operating, temperature management of the projection lens 14 is sustained by operating only the partial temperature regulating section 30.
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