| 发明名称 |
PROJECTION OBJECTIVE |
| 摘要 |
The invention relates to a projection objective which consists of at least seven lenses that are adjacent to air on both sides. The inventive projection objective meets the criteria of the following equations in its totality: u >/= 12.8 DEG ; 100mm </= LEP </= 400mm; sigma RBa >/= 1 DEG ; sigma RBi </= -14 DEG , whereby u is the aperture angle (2u-entire angle) on the illumination side; LEP is the distance from the entrance pupil (on the illumination side) to the object level (the position in the direction of projection from the reference point: object level corresponds to a positive value); sigma RBa is the angle inclination of the beam in relation to the optical axis in the object space between the object and the 1. lens surface of the objective, said beam limiting the bundle for the field edge (outer field point in the object) towards the outside (away from the optical axis, far from the axis) and sigma RBi is the angle inclination of the beam in relation to the optical axis in the object space between the object and the 1. lens surface of the objective, said beam limiting the bundle for the field edge (outer field point in the object) towards the inside (towards the optical axis, close to the axis). The angles sigma RBa and sigma RBi are positive when the corresponding beams intersect the optical axis in a point which is situated in the opposite direction of projection when seen from the object. Said angles are negative when the beams intersect the optical axis in a point which is situated in the direction of projection when seen from the object.
|
| 申请公布号 |
WO0153869(A8) |
申请公布日期 |
2003.01.09 |
| 申请号 |
WO2001DE00160 |
申请日期 |
2001.01.16 |
| 申请人 |
OPTISCHE SYSTEME GOETTINGEN ISCO-OPTIC AG;DR.- ING. WOLFGANG REINECKE INGENIEURBUERO FUER OPTIK-ENTWICKLUNG;REINECKE, WOLFGANG;LINGE, HORST |
发明人 |
REINECKE, WOLFGANG;LINGE, HORST |
| 分类号 |
G02B13/00;G02B13/02;(IPC1-7):G02B9/64 |
主分类号 |
G02B13/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
