发明名称 IMAGE SENSOR AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: An image sensor and a method for manufacturing the same are provided to improve charge transfer efficiency and to enhance capacitance by using a ridge-shaped P0 region of a photodiode. CONSTITUTION: A transfer gate(32) having a gate spacer(33) is formed on a semiconductor substrate(30) of the first conductive type. The first impurity region(n-) of the second conductive type for a photodiode(PD) is formed in the semiconductor substrate(30) between the transfer gate(32) and a field oxide layer(31). The second impurity region(P0) of the first conductive type for the photodiode(PD) is formed on the first impurity region(n-) so as to protrude on the substrate(30). The thickness of the ridge-shaped second impurity region(P0) is 0.1-0.2 micrometer.
申请公布号 KR20030002877(A) 申请公布日期 2003.01.09
申请号 KR20010038705 申请日期 2001.06.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LIM, YEON SEOP
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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