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发明名称
Photoempfindliche Verbindungen, photoempfindliche Harzzusammensetzungen, und Verfahren zur Herstellung von Mustern unter Verwendung dieser Verbindungen oder dieser Zusammensetzungen
摘要
申请公布号
DE69809629(D1)
申请公布日期
2003.01.09
申请号
DE19986009629
申请日期
1998.05.11
申请人
TOYO GOSEI KOGYO CO. LTD., ICHIKAWA
发明人
SHIBUYA, TORU;XIE, JIAN RONG;TOCHIZAWA, NORIAKI
分类号
C07D277/20;C08F8/34;G03F7/00;G03F7/004;G03F7/008;G03F7/012;(IPC1-7):G03F7/012
主分类号
C07D277/20
代理机构
代理人
主权项
地址
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