发明名称 Ferroelectric memory device, e.g. ferroelectric random-access memories comprises bottom electrode patterns formed on semiconductor substrate, and first and second ferroelectric layers
摘要 <p>A ferroelectric memory device has bottom electrode patterns formed on a semiconductor substrate, first ferroelectric layer on the substrate and disposed between the electrode patterns, and second ferroelectric layer formed on a top surface of the electrode pattern and a top surface of the first layer. An independent claim is also included for a method of fabricating the ferroelectric memory device.</p>
申请公布号 DE10227346(A1) 申请公布日期 2003.01.09
申请号 DE2002127346 申请日期 2002.06.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, KYU-MANN
分类号 H01L27/105;H01L21/02;H01L21/3105;H01L21/316;H01L21/321;H01L21/8246;H01L27/115;(IPC1-7):H01L27/105;H01L21/823 主分类号 H01L27/105
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