| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope illumination device which is small in size and substantially free from illumination unevenness. SOLUTION: This illumination device comprises a surface light emitting light source 1 which is integrated with plural surface light sources 1a for emitting illumination light in array shape and a field lens 2 for approximately paralleling the divergent light from the surface light emitting light source 1 and is constituted by arranging an optical element (hereafter described as an optical integrator) which is two-dimensionally arranged with plural lens elements 3a and converts the surface light emitting light source 1 to plural light source images near the rear side focal position of the field lens 2. The device further comprises a relay lens 4 for relaying the exit surface of the optical integrator 3 to an aperture stop F.S., or an aperture stop conjugation surface and a condenser lens 5 for irradiating an exit port A.S. with the light from the aperture stop 4.
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