ARC TYPE ION PLATING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To prevent the deterioration, etc., by a temperature rise of a substrate during deposition by enhancing the performance of cooling the substrate. SOLUTION: This arc type ion plating equipment has a cooler 34 which is attached to the end on the inner side of a vacuum vessel 2 of a revolving shaft 4a and internally has a refrigerant flow passage 36 of an area wider than the area of a refrigerant flow passage 6 of the revolving shaft 4a and in which the hand-over of the refrigerant 16 is performed between itself and the refrigerant flow passage 6 of the revolving shaft 4a. The cooler 34 is mounted with a turntable 18 for holding the substrate 20 to be deposited.