| 摘要 |
PROBLEM TO BE SOLVED: To feed a polycrystalline silicon raw material without lowering working efficiency in disassembly, cleaning and assembly of a CZ furnace, without causing an increase in the manufacturing cost of the CZ furnace and without lowering the quality of a single crystal silicon. SOLUTION: A raw material feeding device 100 is provided so as to be freely separated from a single crystal pulling vessel 1. In the raw material feeding device 100, a feeding device side opening part 8 is provided so as to be freely attached and detached to a vessel side opening part 3 provided to the single crystal pulling vessel 1. Further, a feeding pipe 13 is arranged so as to be freely moved from the inside to the outside of the feeding device side opening part 8. Furthermore, there are provided driving shafts 11, 51, 52 each having freedom to move the tip end 13a of the feeding pipe 13 to the outside from the inside of the feeding device side opening part 8 and to situate it in the vicinity of a melt 71 in the single crystal pulling vessel 1 through the vessel side opening part 3 when the feeding device side opening part 8 is attached to the vessel side opening part 3.
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