| 摘要 |
PURPOSE: A reticle using an asymmetric overlapping mark is provided to easily sense a reverse-loading of the reticle by using the asymmetric overlapping mark. CONSTITUTION: A reticle comprises a plurality of symmetric overlapping marks(11,12,13,14) formed on a scribe line. The reticle further includes an asymmetric overlapping mark(24) for sensing a reverse-loading of the reticle. Also, the location of the symmetric overlapping marks(11,12,13,14) is asymmetrically different from the location of the asymmetric overlapping mark(24). The difference of the location between the symmetric overlapping mark(14) and the asymmetric overlapping mark(24) is about 1 micrometer.
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