METHOD OF MANUFACTURING FILM THICKNESS CHANGING THIN FILM AND OPTICAL WAVEGUIDE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method which easily makes thin films freely controlled in layer thickness with high accuracy on a substrate. SOLUTION: The first thin film 2a is formed on a substrate 1 and the formed first thin film 2a is processed to coarse and dense patterns in conformity with a prescribed thin film distribution. The second thin films 2b are formed thereon. The second thin films 2b intrude into the recessed parts of the first thin film formed and patterned by a method of lowering the viscosity during the forming process step.