| 摘要 |
PROBLEM TO BE SOLVED: To automatically remove dust accumulated at a front edge in the moving direction of a slider that moves in a two-dimensional direction in detecting an overtravel position. SOLUTION: In this two-dimensional positioning device comprising the slider that is movable on a platen formed in a square shape in X and Y axial direction, a servo driver for controlling the movement of the slider, X axis/Y axis stoppers provided at edge parts in the X and Y axial directions of the platen, respectively and an X axis/Y axis OT position detecting part provided at the X axis/Y axis stoppers for detecting overtravel of the slider, the X axis/Y axis stoppers are provided with a means for eliminating dust attached to the slider, dust is brought into contact with the eliminating part to be removed when the slider is detected by the X axis/Y axis OT position detecting part, and a return movement to the origin which moves the dust to corners of the platen by moving the slider is also performed with a position detected by the X axis/Y axis OT position detecting part as reference.
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