发明名称 |
Method for forming the air bearing surface of a slider using nonreactive plasma |
摘要 |
The invention relates to a method for producing magnetic sliders having a permanent protective coating of carbon over the air bearing surface. The method comprises the steps of: (a) depositing a temporary protective coating on a surface of the slider, the temporary protective coating comprising a layer carbon; (b) depositing a photoresist layer onto the temporary protective coating; (c) imagewise exposing the photoresist layer to radiation; (d) developing the image in the photoresist layer to expose the temporary protective coating; (e) transferring the image through the temporary protective coating and into the slider to form the air bearing pattern in the slider; (f) removing the temporary protective coating using nonreactive plasma; and (g) depositing a permanent protective coating comprising a layer of carbon.
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申请公布号 |
US6503406(B1) |
申请公布日期 |
2003.01.07 |
申请号 |
US20000633500 |
申请日期 |
2000.08.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HSIAO YIPING;HWANG CHERNGYE;FOX CIARAN A.;HSIAO RICHARD |
分类号 |
G11B5/10;G11B5/255;G11B5/60;(IPC1-7):G11B5/127 |
主分类号 |
G11B5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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