| 发明名称 |
Chamber having improved gas energizer and method |
| 摘要 |
A chamber 35 for energizing a gas comprises a gas distributor 85 having an aperture 250 for introducing gas into the chamber 35 and a wall 175 comprising boron nitride. The chamber 35 further comprises a gas energizer 90 capable of passing electromagnetic energy through the wall 175 to energize the gas in the chamber 35.
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| 申请公布号 |
US6502529(B2) |
申请公布日期 |
2003.01.07 |
| 申请号 |
US19990321485 |
申请日期 |
1999.05.27 |
| 申请人 |
APPLIED MATERIALS INC. |
发明人 |
HERCHEN HARALD |
| 分类号 |
B01J19/08;C23C16/44;C23C16/452;C23C16/507;C23C16/511;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23C16/00;H05H1/00 |
主分类号 |
B01J19/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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