| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film-forming device which reuses a suspended residual mist in a mist-accumulating bath. SOLUTION: This thin film-forming device (1) is equipped with a plurality of mist-generating units (9a), (9b), (9c) to generate mist of differing material solutions for forming a film, a mist-accumulating bath (7) which is connected with respective mist-generating units (9a), (9b), (9c) through respective mist- feeding pipes (11a), (11b), (11c) with supply valves (47a), (47b), (47c), and accumulates each mist fed from respective mist-generating units (9a), (9b), (9c), and a plurality of mist recovery pipes (13a), (13b), (13c). These recovery pips are respectively arranged between the mist-accumulating bath (7) and the mist- generating units (9a), (9b), (9c) and respectively have the exhaust valves (49a), (49b), (49c) to be closed at the time of accumulating mist. Also, these recovery pipes open the exhaust valves (49a), (49b), (49c) only corresponding to a suspended residual mist in the mist-accumulating bath (7) at the time of recovering mist, and exhaust and recover the suspended residual mist in the mist-accumulating bath (7) to the original mist-generating units (9a), (9b), (9c).
|
