| 摘要 |
A substrate for a photoelectric conversion device that is effective in trapping light in a photovoltaic layer and can be manufactured by industrial mass-production, a method of manufacturing the same, and a photoelectric conversion device using the same. On a glass sheet containing an alkaline component, a first undercoating film containing tin oxide as a main component, a second undercoating film, and a conductive film containing tin oxide as a main component are formed in this order, thus obtaining a substrate. The first undercoating film is formed by a thermal decomposition oxidation reaction of coating-film forming materials containing chlorine on glass with a temperature of at least 600° C. In the first undercoating film, holes are formed without an after-treatment. The surface of the conductive film above the holes has larger irregularities, thus scattering incident light on a photovoltaic unit. Further, on the photovoltaic unit, a back electrode is formed, thus obtaining a photoelectric conversion device.
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