COATING APPARATUS

摘要

PURPOSE: To provide a method of limiting the coating zone surely with a masking device in the coating of the coating zone of a substrate with a coating apparatus by limiting with the masking device. CONSTITUTION: Grooves 11 to be coated with an organic electroluminescent(EL) material are formed on the substrate S and the organic EL material is poured in the grooves 11 to be applied by moving nozzles 4a-4c along the grooves 11. The substrate S is masked by a peripheral part masking device 50 and masking plates 51 and 52 are moved by controlling driving means 53 and 54 by a control part 9. The movement of the masking plates 51 and 52 is carried out by shifting by a prescribed extent in the direction reverse to the moving direction of the nozzles 4a-4c. As a result, the organic EL materials 10a-10c are applied on the substrate S while surely limiting the coating zone.