| 摘要 |
PURPOSE: To realize such control that intervals of vibrations become constant by following the vibration of a substrate by a nozzle even the natural frequency vibrations of a device are generated by a high coating speed or the like. CONSTITUTION: The device for coating paste is provided with a Z-axis moving table 11 as a coarse motion actuator which is driven by a Z-axis servomotor 12 as a drive means for a nozzle (not illustrated) provided at the tip part of a cylinder 13 for storing paste with respect to the Z-axis direction, and a high speed Z-axis moving table 26 which is driven by a linear actuator (not illustrated). They are driven according to detected output by a range finder 16, the Z-axis moving table 11 largely and slowly moves the nozzle in the Z-axis direction, and the high speed Z-axis moving table 26 minutely moves it at high speed. At the initial positioning time, positional control is conducted by the coarse motion actuator, and during coating paste, high speed positional control is conducted by a minute motion actuator, as a result, coating paste with high precision is realized. |
