发明名称 |
NANOLITHOGRAPHY METHODS AND PRODUCTS THEREFOR AND PRODUCED THEREBY |
摘要 |
In one aspect, a method of nanolithography is provided using a driving force to control the movement of a deposition compound from a scanning probe microscope tip to a substrate. Another aspect of the invention provides a tip for use in nanolithography having an internal cavity and an aperture restricting movement of a deposition compound from the tip to the substrate. The rate and extent of movement of the deposition compound through the aperture is controlled by a driving force. |
申请公布号 |
WO03001633(A2) |
申请公布日期 |
2003.01.03 |
申请号 |
WO2002US02520 |
申请日期 |
2002.01.28 |
申请人 |
NORTHWESTERN UNIVERSITY |
发明人 |
MIRKIN, CHAD, A.;HONG, SEUNGHUN;DRAVID, VINAYAK, P. |
分类号 |
B05D1/00;B05D1/18;B05D1/26;B82B3/00;G01Q80/00;G03F7/00;G03F7/16 |
主分类号 |
B05D1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|