| 发明名称 |
METHOD FOR CARRYING OUT LOCAL LASER-INDUCED ETCHING OF SOLID MATERIALS |
| 摘要 |
The invention relates to a method for carrying out local laser-induced etching of solid materials. According to the invention, a surface of a solid material, which is held in contact with a fluoro-organic compound provided in a liquid or supercritical phase, is irradiated with a laser beam that, in turn, etches the surface. |
| 申请公布号 |
WO03000456(A2) |
申请公布日期 |
2003.01.03 |
| 申请号 |
WO2002DE02259 |
申请日期 |
2002.06.21 |
| 申请人 |
SEPPELT, KONRAD;POPKOVA, VERA YAKOVLEVNA;SHAFEEV, GEORGII AYRATOVITCH;SIMAKIN, ALEXANDER VLADIMIROVITCH |
发明人 |
SEPPELT, KONRAD;POPKOVA, VERA YAKOVLEVNA;SHAFEEV, GEORGII AYRATOVITCH;SIMAKIN, ALEXANDER VLADIMIROVITCH |
| 分类号 |
C03C15/00;C03C23/00;C04B41/53;C04B41/91;C09K13/08;H01L21/04;H01L21/306;H01L21/311 |
主分类号 |
C03C15/00 |
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