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发明名称
VISIBLY MARKED PARTS AND METHOD FOR USING SAME
摘要
申请公布号
EP1268877(A2)
申请公布日期
2003.01.02
申请号
EP20010920812
申请日期
2001.03.27
申请人
APPLIED MATERIALS, INC.
发明人
CROCKER, STEVEN, C.
分类号
C23C14/00;C23C14/50;C23C14/56;C23C16/44;C23C16/458;H01L21/31;(IPC1-7):C23C16/44
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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