发明名称 |
Apparatus and method for providing square wave to atomic force microscope |
摘要 |
An apparatus and method for providing an input signal having a desired pulse width and amplitude to atomic force miscoscopes (AFMs) for use in nano-lithography are provided. An input signal providing apparatus for a contact type AFM includes: a pulse width adjusting unit which adjusts the width of a positive pulse of an input square wave to a predetermined pulse width; and an amplitude adjusting unit which adjusts the amplitude of the positive pulse of the square wave to a predetermined voltage. An input signal providing method for the contact type AFM uses the apparatus having this structure. An input signal providing apparatus for a non-contact type AFM further includes a square pulse generating unit which generates a square pulse having a predetermined phase in synchronization with an input resonance signal, and an input signal providing method for the non-contact type AFM further involves generating the square pulse having a predetermined phase in synchronization with the input resonance signal. As a result, more precise nano-lithography can be achieved using an AFM to which the apparatus and method described above are applied.
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申请公布号 |
US2003001641(A1) |
申请公布日期 |
2003.01.02 |
申请号 |
US20020124023 |
申请日期 |
2002.04.17 |
申请人 |
HANYANG HAK WON CO., LTD. |
发明人 |
KIM YOUNG-HWAN;CHUNG CHUNG CHOO;LEE HAIWON |
分类号 |
G01Q60/34;H03K5/02;H03K5/05;(IPC1-7):H03K5/01 |
主分类号 |
G01Q60/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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