PLUG AND PLAY SENSOR INTEGRATION FOR A PROCESS MODULE,申请号EP20010918818-传众专利搜索

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发明名称	PLUG AND PLAY SENSOR INTEGRATION FOR A PROCESS MODULE
摘要
申请公布号	EP1269276(A2)	申请公布日期	2003.01.02
申请号	EP20010918818	申请日期	2001.03.19
申请人	LAM RESEARCH CORPORATION	发明人	HUANG, CHUNG-HO;HEMKER, DAVID, J.;LUI, ANDREW
分类号	H01L21/02;G06F13/40;(IPC1-7):G05B19/042	主分类号	H01L21/02
代理机构		代理人
主权项
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