发明名称 METHOD OF PREPARING AN ARRAY OF NANPORES AND ARRAY THUS OBTAINED
摘要 Pathways to rapid and reliable fabrication of nanocylinder arrays are provided. Simple methods are described for the production of well-ordered arrays of nanopores, nanowires, and other materials. This is accomplished by orienting copolymer films and removing a component from the film to produce nanopores, that in turn, can be filled with materials to produce the arrays. The resulting arrays can be used to produce nanoscale media, devices, and systems.
申请公布号 EP1268087(A2) 申请公布日期 2003.01.02
申请号 EP20010922532 申请日期 2001.03.22
申请人 UNIVERSITY OF MASSACHUSETTS 发明人 TUOMINEN, MARK;SCHOTTER, JOERG;THURN-ALBRECHT, THOMAS;RUSSELL, THOMAS, P.
分类号 B82B3/00;B05D3/02;B82B1/00;C08J9/00;C08L;C08L53/00;C09D153/00;C30B29/60;G11B5/65;H01F10/12;H01L21/31;H01L21/326;H01L21/469;H01L21/479;H01L43/08;H01L43/12 主分类号 B82B3/00
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