发明名称 Clogging-free drain system installed in a cutting apparatus
摘要 Disclosed is a clog-free drain system installed in a cutting apparatus. The system includes an expandable cover for covering a path which a chuck table follows, a water case for receiving used machining water guided by the expandable cover, and a drain pool for tentatively storing the used machining water from the water case before allowing it to drain off. The drain pool has its bottom positioned at a level lower than the bottom of the water case, and the drain pool has its drain outlet formed at a level higher than the bottom of the drain pool. The water case has water flow creating apparatus for driving the used machining water to the water pool.
申请公布号 US6500058(B2) 申请公布日期 2002.12.31
申请号 US20010948680 申请日期 2001.09.10
申请人 DISCO CORPORATION 发明人 BAJO SOJIRO;TAMURA OKIHARU
分类号 F01D25/00;B23Q11/00;B23Q11/08;B23Q11/10;B24B55/02;B24B57/02;B28D7/02;F02C7/00;H01L21/301;(IPC1-7):B24B41/00 主分类号 F01D25/00
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