发明名称 |
Topographical electrostatic protection grid for sensors |
摘要 |
A structure and method for dissipating charges comprising an underlying dielectric layer disposed over capacitor plates of sensor circuitry a gap being formed conformally between adjacent plates and a topographic discharge grid over the underlying dielectric layer and wherein the topographic discharge grid fills at least a portion of the gap between the plates over the dielectric layer and diffuses electrostatic charges at the surface of the integrated circuit.
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申请公布号 |
US6501142(B2) |
申请公布日期 |
2002.12.31 |
申请号 |
US20010843260 |
申请日期 |
2001.04.25 |
申请人 |
STMICROELECTRONICS, INC. |
发明人 |
THOMAS DANIELLE A.;FANG MING |
分类号 |
H01L27/04;A61B5/117;G01B7/28;G01B7/34;G06K9/00;G06T1/00;H01L21/822;(IPC1-7):H01L27/14 |
主分类号 |
H01L27/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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