发明名称 INP HETEROJUNCTION BIPOLAR TRANSISTOR WITH INTENTIONALLY COMPRESSIVLEY MISSMATCHED BASE LAYER
摘要 <p>A heterojunction bipolar transistor (HBT) having a substrate formed of indium phospide (InP) and having emitter, base and collector layers formed over the substrate such that the base layer is disposed between the emitter and collector layers. The collector layer formed from InGaAs, and the collector layer being doped n-type. The emitter layer formed from InP, and the emitter layer bieng doped n-type. The base layer formed of indium gallium arsenide (InGaAs), the base layer being compressively mismatched, and doped p-type. A lattice mismatch between the substrate and the base material is greater than 0.2%. In an x-ray rocking curve of the heterojunction bipolar transistor, a peak corresponding to the base layer being separated from a peak corresponding to the substrate layer by at least -250 arcseconds. In one embodiment this results from a percentage of indium in the base layer being greater than 54.5%, that is a lattice constant of the base layer is substantially larger than a lattice constant of the substrate throughout an entire base region.</p>
申请公布号 WO2002103803(A1) 申请公布日期 2002.12.27
申请号 US2002019383 申请日期 2002.06.18
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