| 摘要 |
<p>The invention provides a compact, linear XYZ-scanner system, including an X-axis unit mounted on a chassis member and including an X-axis motor means fixedly attached to the chassis and adapted to drive a slide linearly guided by first guide means; an X-mirror mount moving together with the X-axis unit; a Y-axis unit mounted on a first bracket that moves together with the X-axis unit and including Y-axis motor means fixedly attached to the first bracket and adapted to drive a slide linearly guided by second guide means; a Y-mirror mount moving together with the Y-axis unit; a Z-axis unit mounted on a second bracket that moves together with the Y-axis unit and including Z-axis motor means fixedly attached to the second bracket and adapted to drive a side linearly guided by third guide means, and a lens mount carrying a focusing lens and moving together with the Z-axis unit; wherein a light bean emitted by a light source and impinging on the X-mirror is reflected in an XY-plane onto the Y-mirror and thence, in an YZ-plane into the focusing lens, and wherein, by selectively actuating the motor means, the focal point of the light beam focused by the focusing lens can be moved to any point within a three-dimensional coordinate system.</p> |
