CERAMICS FILM AND PRODUCTION METHOD THEREFOR, AND FERROELECTRIC CAPACITOR, SEMICONDUCTOR DEVICE, OTHER ELEMENTS

摘要

A method of producing a ceramics film comprising the step of forming a ceramics film by crystallizing a ceramics source solution containing a first source solution and a second source solution. The first source solution is different in category from the second source solution, the former being used to produce ferroelectrics and the latter being used to produce oxides such as ABO system, a solvent contained in the former is different in polarity from that contained in the latter, and the first source solution and the second source solution are formed into films with phases separated to thereby form first crystals consisting of the first source solution intermittently in the plane direction of the ceramics film and form second crystals consisting of the second source solution so as to intervene between the first crystals.