| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature controller, with which the entire configuration can be miniaturized to the utmost and non-uniformity in the distribution of temperature on a placing plate can be suppressed to the utmost. SOLUTION: In a cooling fluid access part 10B on a placing plate 10, one cooling fluid inlet 10i and one cooling fluid outlet 10o are formed on a central axial line O-O of the placing plate 10. Besides, in the cooling fluid access part 10B on the placing plate 10, a branch feeding channel 10v is formed for leading a cooling fluid which is introduced from the cooling fluid inlet 10i into each of channels 10c positioned on both sides of a central axial line X-X of the placing plate 10. Further, between the cooling fluid inlet 10i and the cooling fluid outlet 10o in the cooling fluid access part 10B on the placing plate 10, a heat transfer amount control part 10H is provided for controlling the transfer amount of heat between a work placing part 10A of the placing plate 10 and the cooling fluid access part 10B.
|
