| 摘要 |
The objective of the present invention is to provide a transfer device for substrate capable of preventing deformation or breakage of substrate due to bending stress, by reducing the amount of dead weight deflection of substrate, such as large mother glass boards, etc. Also, on this transfer device for substrate, provided with supporting members in opposite directions disposed in extension from two sides of a storage device, and designed in such a way as to introduce or remove substrate by raising and lowering the hand of a transfer machine inserted into the storage device between said supporting members, said supporting members are comprised of a plurality of supporting members in parallel formed with a gap between the supporting members facing each other and that said hand is comprised of a plurality of transversal hand supporting members in the direction of breadth positioned between said parallel supporting members, and of a longitudinal hand supporting member in the direction of length, positioned between said supporting members facing each other, and connecting said transversal hand supporting members, at the lifting position of the hand.
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