DEVICE AND METHOD FOR EVALUATING MULTICHIP MODULE

摘要

PROBLEM TO BE SOLVED: To cut down a test cost and to reduce a through current of a semiconductor chip which is out of the object of inspection by reducing the number of channels of an LSI tester. SOLUTION: In testing a plurality of semiconductor chips in a multichip module, a switching circuit is provided on an evaluation board or in the semiconductor chip. The terminal of the evaluation board is thereby used in common to reduce the number of channels of the LSI tester and to reduce the test cost. Moreover, the input value of a semiconductor integrated circuit device is fixed by the switching circuit to reduce the through current of the semiconductor chip which is out of the object of test.