摘要 |
PROBLEM TO BE SOLVED: To reduce influence on resonance characteristic which resonators exert on each other, and realize miniaturization of the entire size. SOLUTION: The piezoelectric resonator 1 of a thickness longitudinal vibration mode type includes at least a pair of upper and lower electrodes 5, 6 arranged on the upper side of a diaphragm, and a piezoelectric film 7 of at least one layer, disposed between the electrode 5 and 6 which are plural electrodes 52, 62 of continuous length and vertically intersected to interpose the piezoelectric film 7. The respective electrodes 52 of continuous length on the lower electrode 5 side are electrically connected in parallel. The respective electrodes 62 of continuous lengths on the upper electrode 6 side are electrically connected in parallel. As to the electrodes of continuous length on the lower electrode side and the upper electrode side, electrode widths w1 and w2 are set to at least 10μm and at most 5λ(λis the vibration wavelength), and mutual separations distances d1, d2 are set apart by least 1/2λ.
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