发明名称 |
Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same |
摘要 |
A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. A piezoelectric/electrostrictive element is arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, the movable section and the fixation section. A central portion of the movable section is cut off to form mutually opposing end surfaces in the movable section.
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申请公布号 |
US6498419(B1) |
申请公布日期 |
2002.12.24 |
申请号 |
US20000524042 |
申请日期 |
2000.03.13 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
TAKEUCHI YUKIHISA;NANATAKI TSUTOMU;IKEDA KOJI;KIMURA KOJI;SHIBATA KAZUYOSHI |
分类号 |
H01L41/09;H01L41/24;H01L41/27;H01L41/39;H02N2/00;(IPC1-7):H01L41/08 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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