发明名称 Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same
摘要 A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. A piezoelectric/electrostrictive element is arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, the movable section and the fixation section. A central portion of the movable section is cut off to form mutually opposing end surfaces in the movable section.
申请公布号 US6498419(B1) 申请公布日期 2002.12.24
申请号 US20000524042 申请日期 2000.03.13
申请人 NGK INSULATORS, LTD. 发明人 TAKEUCHI YUKIHISA;NANATAKI TSUTOMU;IKEDA KOJI;KIMURA KOJI;SHIBATA KAZUYOSHI
分类号 H01L41/09;H01L41/24;H01L41/27;H01L41/39;H02N2/00;(IPC1-7):H01L41/08 主分类号 H01L41/09
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