| 摘要 |
PROBLEM TO BE SOLVED: To provide a micron-sized and submicron-sized gear incorporated into a micro-machine. SOLUTION: A gear having a projecting tooth on a peripheral surface, or a gear having a magnetic tooth on a peripheral surface, or a gear having a static electricity gear on a peripheral surface, and its manufacturing method form a gear such as a worm gear, a spur gear, and a bevel gear by applying the said either tooth, and a complicated-shaped gear by using a thin film forming technology such as deposition, sputtering, a plating technology, CVD, and an oxidation processing, and a fine processing technology such as photolithography and etching for collectively forming the tooth and the gear in the same process, and are characterized by particularly using an exposure quantity control exposure method and a transfer etching method. |
