| 摘要 |
An extraction region other than its mask holes is divided into a plurality of portions according to predetermined rules, in such a way that the mask holes are set to variable {2} and the portions thus divided except the mask holes are set to a variable {0} or {1}, thereby specifying variables a={0}, {1}, {2}. Then, scanning is performed in both X-axis and Y-axis directions, to divide a portion of variable {1} into a plurality of portions, to each of which is set any one of variables {0, 1, 2} which is determined on a basis of likelihood of defectiveness of its own, so that subsequently the variable of portions of variable {1} is reviewed on the basis of its likelihood of defectiveness. Specifically, a portion whose variable is set to {1} finally and also which has a variable permutation of {2} ->{1} ->{2} in its adjoining both-side portions is detected as a donut problem occurrence portion and the other portions are detected as a leaf problem occurrence portions. |
