发明名称 Semiconductor device and method of manufacturing same
摘要 Provided are a semiconductor device having a MOS transistor of a structure capable of obtaining a good characteristic particularly about assurance of resistance to punch-through and leak current reduction, as well as a method of manufacturing the same. That is, in addition to the usual MOS transistor structure, a channel dope region (1) is disposed at a predetermined depth so as to extend substantially the entire surface of a flat surface in a P well region (22) including a channel region. In the channel dope region (1), it is set so that the maximum value of the P type impurity concentration (MAX of P) ranges from 1x1018 to 1x1019, and the maximum value of the N type impurity concentration (MAX of N) of a source/drain region (31 (32)) is not less than 10% and not more than 100%. Note that the surface proximate region of the P well region (22) is to be beyond the object.
申请公布号 US6498077(B2) 申请公布日期 2002.12.24
申请号 US20010816519 申请日期 2001.03.26
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 UENO SHUUICHI;HORITA KATSUYUKI;KUROI TAKASHI
分类号 H01L21/265;H01L21/336;H01L21/8242;H01L27/108;H01L29/10;H01L29/78;(IPC1-7):H01L21/425 主分类号 H01L21/265
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